E-LMT-XYZ (kiʻekiʻe kiʻekiʻe pololei laina laina XYZ Axis pae

ʻEleʻele kiʻekiʻe me ka pololei a me ka palahalaha o ka neʻe ʻana

Hāʻawi ka hoʻolālā paepae kahua kū i ka pololei a me ka palahalaha maikaʻi loa, me ka pitch a me ka yaw

ka hana i hoʻohālikelike ʻia me nā pae hoʻonohonoho laina i kau ʻia ma luna, kahi e hiki ai i ka haʻahaʻa cantilevered ke kumu

deflections i ke kākoʻo linear bearings.

ʻO ka neʻe laina laina hoʻoholo kiʻekiʻe me ka leo Servo MotorsE-ABVT-Z ke alakaʻi ʻia i loko e kahi kaʻa leo coil, lako.

me ke kaʻa hoʻoili ea e lana ana (hiki ke hoʻohana ʻia nā ala alakaʻi pōpō keʻa), a hoʻohana i ka pahu hoʻonā kiʻekiʻe e pani ai.

ka loop, a ua lako me ka kiʻekiʻe-hana Keaukaha e hōʻoia i ka palena iki neʻe a me ka repeatability o

ke kahua hoʻonohonoho.e hoʻokō i ka hana nui.

Mana kamepiula, lako polokalamu, papahana

Huahana Huahana

Mua: E-NFZ240-Z moʻo (Z-axis high-precision linear motor stage)

Aʻe: Mana Mana Mana Mana a me EtherCAT® Pūnaewele Mana Mana ACS

Hōʻike	LMT-XY-200X200	ABVT-Z20(Air bearing rail)
ʻAno kaʻa	ʻEkolu ʻāpana hao ʻole	ʻO ka mokini wili leo+
Olelo Hooholo	Ka nui kikohoʻe 100nm paʻamau	1vpp a hiki i 5nm
Kaʻa kaʻa	Hoʻomau 60N/peak 210N	Hoʻomau 60N/peak 210N
nui kaʻina liʻiliʻi[nm]	200nm	100nm
Kaʻahele [mm]	200×200	10
Hiki hou [um]	±0.3
Kūlana pololei [um]	±1	±0.5
palahalaha [um]	10um	5um
pololei [um]	1um	1um
Ka māmā māmā [mm/s]	500mm/s	30mm/s
Hiki ke hoouka [kg]	5kg (Z axis me ka pneumatic mau ke kaupaona kaulike)