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E-SCAN moʻo o nā huahana SCAN -1 Nano Scanning Stage
ʻO ka ʻōnaehana scanning series μSCAN kahi ʻōnaehana hoʻohui kiʻekiʻe i hoʻokumu ʻia e kā mākou hui.Hoʻohana ka mīkini holoʻokoʻa i ka granite kiʻekiʻe-rigidity e like me ke kumu, e hui pū me nā mīkini linear kiʻekiʻe a me nā kahua servo, a hoʻohana nui ʻia no ka nānā kiʻekiʻe kiʻekiʻe, ka hana, ka hoʻāʻo a me nā noi ʻē aʻe.Kākoʻo ke koho ʻana i nā ʻāpana stroke maʻamau i ka hāʻawi wikiwiki ʻana, e hōʻemi nui ana i nā hemahema i hui ʻia e ka mea kūʻai aku i ka ʻike ʻole i ka hui pū ʻana a me nā hemahema hana i hoʻokumu ʻia e ka ʻike ʻole me ka debugging.
